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ASML Optics - PerfectWave™ Metrology

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ASML Optics offers, as standard products, extreme precision flats, spheres, aspheric lenses, and off-axis parabolic mirrors that can be used to fill the most demanding product and metrology requirements. Designed as a solution to satisfy commonly occurring needs and fabricated to tolerances that insure unquestioned performance, these components are available with reasonable cost and delivery. PerfectWave products currently include:

  • 4" & 6" Calibration Flats
  • R0.75 and R3.0 Calibration Spheres
  • 4" & 6" Transmission Flats
  • F3.0 & F7.0 Transmission Spheres
  • F2.5 & F5.0 Aspheric Collimating Lenses

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