The ALS130, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations. Unlike many stages that utilize a side-drive lead screw, the ALS130 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup, or "stiction" normally associated with a lead screw or ball-screw drive.

For alignment applications, outstanding step-to-step resolution is critical. The ALS130 meets this demand with a resolution of 20 nm when coupled with an MXH series multiplier box. The direct-drive linear motor allows the ALS130 to make precise, repeatable steps. This is particularly important in alignment applications where step accuracy is critical.

Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometrical tolerances. As a result, straightness and flatness of the standard stage are <= 2 micrometers over the entire travel. Optional HAL calibration improves that to 1 micrometer. As a result, the effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.

ALS130 series stages are available with precision crossed-roller or linear motion guide bearing systems. Crossed-roller bearing models feature outstanding smoothness and vibration-free motion since neither the bearing system nor the linear motor utilizes any recirculating elements. Crossed-roller bearing ALS130 models exhibit the outstanding ripple-free motion required for scanning, inspection, and fiber-optic applications. For applications where higher duty cycle or larger loads must be accommodated, the linear motion guide bearing option is well suited.

The linear motor drive also offers the advantage of higher speeds and accelerations. Top speed of the ALS130 is 300 mm/s, which is significantly faster than comparable ball-screw-driven stages. With a peak unloaded acceleration of 1 g, throughput is not an issue for this precision device.

Like all stages in the Aerotech product family, the ALS130 was designed for outstanding long-term performance. Since both the linear motor and linear encoder are noncontact devices, they not only exhibit long-life, but also are maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

ALS130 series stages are easily configured as XY assemblies. Options include high accuracy calibration at work height and precision orthogonality alignment to 5 arc seconds. Aerotech offers theta, roll, tip-tilt, and piezoelectric solutions to complement the ALS130. Please consult the factory for more information.