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Alcatel Vacuum Products, Inc. - ATH 2800M Adixen Maglev Turbomolecular Pump
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The performance of this pump makes it suitable for light and harsh processes including 300 mm Semiconductor applications, Flat Panel Display, Photovoltaic, Coating, R/D, Space simulator, etc.
User Benefits
- Proven robust technology offering high MTBF in all applications
- Compound rotor design for high pumping speed and high fore line tolerance
- Active 5 axis magnetic bearing system offering low level of noise and vibration
- Special design reducing maximum transmitted torque
- Compact pump design
- Adjustable rotational speed for optimzed pumping parameters
- Integrated purge gas system and temperature management ensuring maximum resistance to process deposition
Product Features
- High throughput at process pressure
- High foreline pressure tolerance
- Maintenance free magnetic bearings
- Clean, oil free vacuum
- High resistance to air inrush
- Available in DN250 ISOF flange
- Compact 1/2 rack controller
- RS232/485, Lonworks compatible
Visit adixen by Alcatel Vacuum Technology for more product details or call 781-331-4200.
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