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Alcatel Vacuum Products, Inc. - ATH 3200 M Adixen Maglev Turbomolecular Pump
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Alcatel Adixen expands its product range by introducing the ATH3200M, a high flow Maglev turbo-molecular pump offering enhanced performance in ISOF 320 flange. The ATH3200M is designed for vacuum applications that require high pumping speed combined with high gas throughput up to 5000 sccm N2.
The performance of this pump makes it suitable for light and harsh processes including 300 mm Semiconductor applications, Flat Panel Display, Photovoltaic, Coating, R/D, Space simulator, etc.
User Benefits
- Proven robust technology offering high MTBF in all applications
- Compound rotor design for high pumping speed and high fore line tolerance
- Active 5 axis magnetic bearing system offering low level of noise and vibration
- Special design reducing maximum transmitted torque
- Compact pump design
- Adjustable rotational speed for optimzed pumping parameters
- Integrated purge gas system and temperature management ensuring maximum resistance to process deposition
Product Features
- High throughput at process pressure
- High foreline pressure tolerance
- Maintenance free magnetic bearings
- Clean, oil free vacuum
- High resistance to air inrush
- Available in DN320 ISOF flange
- Compact 1/2 rack controller
- RS232/485, Lonworks compatible
Visit adixen by Alcatel Vacuum Technology for more product details or call 781-331-4200.
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