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FOCUS ON RELIABILITY AND PERFORMANCE

Features:

• 80-900 l/s pumping speed Nitrogen • Standard, corrosive, and high pressure corrosive versions • High internal conductance • Low rotational speed • <5x10-10 mbar ultimate pressure • Onboard, rack mounted and OEM controller versions • Adjustable rotational speed

Benefits:

• Robust against accidental air inrush and movement • Fast pumpdown time • Field maintainable • Mountable in any orientation • Robust machined rotors and stators • Ability to rough through the turbo

Applications include high vacuum pumping, space simulation, depositon, particle accelerators, general physics experiments, ion sources, surface analyzers, load-lock pumping, electron microscopes, RIE systems, physical vapor depositon, and ion implatation.