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MultiAxis Positioning Stages: Complete System Solutions

Ultra High Vacuum System for Chemical Analysis and Thickness Measurement

Rated to 10-10 Torr, this multi-axis stage uses high resolution piezo motors on the X/Y axes to eliminate servo dither and provide a .1u resolution. The system features high resolution and smooth scanning capability allowing it to move a 300mm wafer under an analyzing sensor inside a vacuum chamber. The X/Y sits on top of a Z wedge stage to provide vertical positioning, controlling the distance to the object. This completely integrated system features servo and piezo motor amplifiers and a 3-axis motion controller. The system utilizes:

- Two piezo driven stages with .1u resolution linear encoders. - Side mounted motors to provide velocity to 200mm/sec without adding to the overall length of the stage assembly. - A Z wedge for vertical positioning, driven by a vacuum compatible rotary servo motor that provides stability to position the X/Y during scanning. - The servo controller commands both traditional servo and piezo amplifiers.

Positioning System for Wafer Fabrication and Inspection:

This 3-axis system consists of X/Y/Z motion complete with brushless linear and rotary servo motors, amplifiers, and a high performance motion controller. The system provides exceptionally high constant velocity required to measure film thickness on the fly. We configure our motion systems for easy installation. Customers can just drop our systems into their pre-existing machine frames, mount their metrology equipment, plug it in and go. The result is a complete system that supports the customer's specific measurement process, with a base plate and customer mounting over the motion system. The system utilizes:

- An indexing axis with an integrated rotary brushless servo mounted directly to a ball screw, eliminating the coupling and motor mounting, reducing package size and providing exceptional dynamic stiffness. - A scanning axis with a patented bearing structure that provides 'air bearing' performance with the linear motor providing high constant velocity. - An autofocus Z axis that uses a vertical wedge with a patented Two-Wire servo motor, allowing the customer to use a brush type amplifier to control a brushless motor.

Vacuum Motion System for Interferometric Autofocus

This vacuum rated multi-axis system provides 3 axes of motion, complete with brushless servo motors, amplifiers and a motion controller. The system has the high stiffness and position repeatability required to autofocus a laser interferometer within a low vacuum environment. Intended for mounting to a platform that tilts in pitch/roll orientations, this system is able to maintain position and minimize deflection. We provide the complete system – pre-tested to customer specifications and ready for immediate operation. The system utilizes:

- Two small leadscrew driven axes with linear encoders and 40mm diameter brushless servo motors, mounted in X/Y orientation. - Precision crossed rollers on each axis for exceptional bearing stiffness; linear encoders on rotary motors to assure repeatability. - A Z wedge for vertical positioning, with an integral brushless servo mounted to the ball screw shaft. - Crossed roller bearings in the horizontal, vertical, and incline planes for high stiffness, eliminating deflection.

Bayside's Systems Group is a uniquely qualified team of application, design and manufacturing engineers that produce integrated customized solutions for your motion control requirements. From one location, Bayside manufactures 3 core technologies: gearheads and gearmotors, linear positioning systems, and servo motors and amps. This provides our Systems Group engineers with the ideal ability to integrate our precision products and components into one complete, turnkey motion control system... before it leaves our facility. We combine linear and rotary motion, servo motors and amps, precision gearing, and motion controllers into high performance, automated "drop-in" solutions that fit seamlessly within your application, saving you time, trouble and effort. Bayside systems pack a tremendous amount of performance into "small footprint" designs, making it possible for companies to improve yield and increase throughput with smaller equipment and facilities. Bayside uses these standard products in its integrated motion platforms: Linear and Rotary Stages, Brushless Rotary and Linear Servo Motors, High Speed Spinner Motors, Inline and Right Angle Gearmotors, Precision Helical Planetary Gearheads.

Bayside Motion Group brings advanced motion control components and automation systems to leading industrial companies worldwide. Bayside's automation solutions are designed to optimize factory equipment and productivity. These solutions include servo systems, geared drives and high accuracy linear positioning systems for customers in the semiconductor, electronics, automotive, medical, machine tool and telecommunications industries. With over 25 recently issue technology patents, Bayside is a unique U.S. manufacturer, providing electromechanical automation subsystems that combine servo motor, gear and linear bearing technologies. With 275 employees and direct operations in the United States, Europe, Japan, Korea and Singapore, Bayside supports customers in more than 80 countries.

For more information contact Bayside Motion Group, 27 Seaview Blvd. Port Washington, NY 11050. Phone: (516) 484-5353; Fax: (516) 484-5496 or visit our web site at www.baysidemotion.com.