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FEATURES

• LCD/Touch Screen User Interface
• Windows™-based Industrial Computer
• New AFA System with full-field CCD camera
• AFA Auto-Contrast Control, wafer-to-wafer
• Automatic Processing Loading
• Pre-Process Checking
• Smart Focus™
• 1st Level IA Limit
• Auto IA Set
• IA -> Prealigner Feedback Loop (thru-put)
• Sensor Timeout Dialogs
• Active 'Watch-Dog' Limit Checking
• Preventative Maintenance Wizards
• Data Logging (Error, History, Uniformity, Overlay, Focus, Session, and Wafer Logs)
• SEMI-GEM E30/E37/E587 Host Link
• Flexible software allows; quick modifications for custom applications, easy version upgrade (non prom-based)

BENEFITS

Increased throughput

• Increased capacity; all levels NOW Automatic
• Decreased setup time
  - Mask and Wafer stages go to last setup position
  - Parameter setting via download is faster than manual
  entry
  - Scan Arms are positioned automatically

Decreased Rework

• Decreased mis-processing
  - Process checking prior to processing
  - Focus System eliminates hitting the wafer with nozzles with Smart Focus™
  - Carriage Balance check to prevent banding
• Decreased mis-alignment
  - Tighter alignments on the tougher levels and fewer mis-alignments due to full field CCD

Decreased Downtime

• Increased MTBF
  - COTS components and fewer components
  - Prealigner software prevents flexure breakage (similar to M700)
  - Prealigner/IA feedback prevents wafer stage flexure breakage
  - Actuator/Sensor failure reports help prevent catastrophic failures
  - Joystick check at Process start to prevent lockup at Viewing
  - Carriage Balance check to prevent overloading A201 PCB
• Decreased Scheduled Downtime
  - Mask Load position and uniformity hold flag software adjustable
  - Focus Matrix & Adjustment (no calculations and/or mistakes)
  - Overlay & Adjustment (no calculations and/or mistakes)
  - Uniformity/Exposure Meter & Adjustment (no calculations and/or mistakes)
• Increased MTBA
  -Retries avoid assists from Operators
• Decreased MTTR
  -No more sequencer listing required when machine stops and doesn't say what's wrong
  -Easier, faster repair & diagnostic procedures, (I/O screen with everything available, point and click)
• Decreased Costs
  - Lowered Repair Costs through use of COTS components
  - Lowered training costs due to User-Friendly