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Non-contact displacement and vibration sensor capable of ultra-high resolution of 0.08nm with high speed response.

In the world of ultra-precision equipment which demand movements in units of nanometers, continuous and sccurate detection of movement status is essential. The DS - 80 employs the Michelson interference method, discovered in the Michelson-Morley experiments, to make highly accurate measurements based on the laser's wavelength. Canon has realized a Michelson interferometer, including both the light source and sensor, in a space of only 47 x 32 x 19 mm using its precision optical technology.