CLF Series Low Frequency RF Power Supplies from Comdel, Inc.

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CLF Series Low Frequency RF Power Supplies

CLF Series Low Frequency RF Power Supplies

Performance: The CLF series generators provide stable process power up to 5 kW. The half-rack supplies operate at any fixed frequency from 20 to 50 kHz. The full- rack models can operate at any fixed frequency from 20 to 450 kHz or auto-tuned up to +/- 15% bandwidth. In many applications, the combination of auto-tune and excess power headroom will allow delivery of power to changing reactive loads without the need for mechanically tuned matching networks.

Applications: The CLF series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Other Product Announcements from Comdel, Inc.

CB Series RF Power Supplies, RF Power with Turbotune Technology, CXH High Power / High Frequency Power Supplies, CX 5K & CX 10K High Frequency RF Power Supplies, ESC-HV Electrostatic Chuck Power Supply, CX Series High Frequency RF Power Supplies, CDX Series Dual Frequency RF Generator, ESC Series Electrostatic Chuck Power Supplies, XDC 1000 DC Power Supply, Match Pro Impedance Matching Networks, CPS Series High Frequency RF Power Supplies, CV Series Very High Frequency (VHF) Power Supplies, CLX Series Low Frequency RF Power Supplies, CXV600S Virtual-Quad RF Generator

Other products from Comdel, Inc. in RF Generators

CB Series - High Frequency RF -- CB1000, CB Series - High Frequency RF -- CB1250, CB Series - High Frequency RF -- CB200, CB Series - High Frequency RF -- CB300, CB Series - High Frequency RF -- CB50, CB Series - High Frequency RF -- CB500, CB Series - High Frequency RF -- CB5000, CB Series - High Frequency RF -- CB600, CDX Series - Dual Frequency -- CDX 1000, CDX Series - Dual Frequency -- CDX 2000

View All RF Generators Data Sheets from Comdel, Inc.

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