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Comdel's CPMX1000 system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process. The CPMX1000 delivers a 20A load current and features automatic and manual modes with local and remote manual control of tuning capacitors, and the ability to preposition capacitors to the optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning.

Specifications:

Frequency range: Configured to operate at fixed frequencies from 2 to 27.12MHz

RF Power Range: 25W- 1250W

RF Output Current: 20A Max.

Line input: 100-240VAC; single phase; 50/60 Hz; or 24 VDC

VSWR: Typically less than 1.5 to 1 in a 50-Ohm system

Cooling: Forced air cooling. Operating ambient temperature range is -10 to +35° C

Mounting: The Match Pro unit must be mounted close to the chamber

for optimum performance. Custom mounting configurations can be accommodated.

Size: 5.5"H x 10"W x 15"D (138mm x 254mm x 375mm)

Weight: 12 lbs (5.5 kgs)

Options: CPMX Remote with RS-232 interface, analog, or DeviceNET control.

For further information contact: MaryBeth Masterson, Marketing Manager, Comdel, 11 Kondelin Road, Gloucester, MA 01930. Phone: 978-282-0620 or 800-468-3144; Fax: 978-282-4980; Email: marybeth_masterson@comdel.com; Web site: www.comdel.com.