See Product Details

Comdel's CPMX6000 system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between Comdel's Match Pro and other matching networks.

The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably - in response to the changes in load characteristics during your process. The CPMX6000 delivers a 75A load current and features automatic and manual modes with local and remote manual control tuning capacitors, and the ability to preposition capacitors to the optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning.

Specifications:

• Frequency Range: Configured to operate at fixed frequencies from 2 to 60MHz
• RF Power Range: 300W-6000W
• Line Input Voltage/Power: 100-240VAC; single phase; 50/60 Hz; 24 VDC (other input voltages may be special ordered.) 100 Watts minimum power required while tuning
• VSWR: Typically less than 1.5 to 1 in a 50-Ohm system
• Cooling: Forced air or water cooling is employed as dictated by network operating "Q" and power level. Operating ambient temperature range is -10 to +35 degrees C
• Mounting: The Match Pro unit must be mounted close to the chamber for optimum performance. Custom mounting configurations are accommodated.
• Size: 7"H x 12.75"W x16"D (198mm x 297mm x 378mm)
• Weight: 24 lbs (10.9 kgs)

For more product details, visit Comdel or call 978-282-0620.

About Comdel, Inc:

Comdel, headquartered in Gloucester, Massachusetts, designs and manufactures RF and DC power supplies and process instruments for the semiconductor, flat panel, and industrial heating industries. Products include RF generators, auto-match impedance monitors, and electrostatic chuck power supplies that are in use worldwide by the industry's major equipment and IC fabrication manufacturers. With flexible power delivery solutions, the broadest frequency ranges available, rapid prototyping, product certification and safety compliance, Comdel provides responsive support and product solutions from its offices in the US, Europe and Asia. Comdel is ISO 9001:2000 certified.