Product Announcement from Comdel, Inc.

ESC-HV Electrostatic Chuck Power Supply-Image

This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact chassis weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation.

Applications: The ESC-HV power supply provides reliable handling in large surface processes.

Features:

  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • No special requirements needed for cooling and shielding
  • Parameter adjustments through variable controls and fully programmable to give the user maximum flexibility

ESC-HV "Standard" Specifications:

  • Output type: Bipolar (fixed)
  • Output voltage: 5,6,7,8,9, and 10KV units available, intermediate voltages available, consult factory for more information
  • Output current: up to 5mA available depending on voltage
  • Output stability: 1% or better of output from 5% to full load
  • Output linearity: Better than 2% full scale
  • Power input requirements: Single 24VDC @ 2A maximum
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors for HV+ and HV-
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required Mechanical Specifications:
  • Size: 3.5"H x 9.5"W x 12.5"D (9cm x 24cm x 31.8cm)
  • Weight: 2.5 lbs. (1.1 kg)
 
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