STYRAX - Waste Gas Treatment ready for 450 mm
Product Announcement from DAS Environmental Expert GmbH
STYRAX is a tool family for waste gas treatment using burn/wet technology of the DAS Environmental Expert GmbH. It was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industries. Both, single reactor systems and double reactor systems with back up function are available. STYRAX systems are Semi S2 certified and ready for 450 mm. Longer maintenance cycles increase the system’s uptime. Access for operation and maintenance is found at the front and back. Operation costs and general safety can be optimized with a process-tool-interface.