The micro-structures can be free-standing or permanently bonded to silicon wafers or any relatively smooth

substrate. To date, we have built micro-structures with features as small as 0.002mm and aspect ratios as high as

20:1. (See chart below for aspect ratio guidelines.) This capability relies on a variety of commercially available

photoresists and Metrigraphics' considerable experience in photo lithography, thin-film deposition, electroplating.

Recently developed proprietary processes for these micro-structures allow building micro structure shim master mold for micro fluidic applications in PDMS .