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OVERVIEW:

The automated Ingot Metrology Tool inspects silicon ingots for lifetime, weight, length, diameter, perpendicularity, and conductivity, while providing a test platform for several additional client inspections as well. Test results are recorded to disk or network, with individual ingots later identifiable via a laser-etched 2-dimensional barcode applied within the tool.

The ingot's weight is precisely calculated by four load cells, with dimensions and face perpendicularity verified by laser transducers. Conductivity testing is performed by an off-the-shelf test head utilizing four tungsten-carbide needles, delivering output accuracy of approximately 0.3%. Lifetime testing will be performed by your choice of vendor.

Following automated barcode etching, an on-board barcode reader automatically confirms barcode data is both present and readable. The ingot metrology tooling is fully automated, requiring minimal operator attention during normal machine operation.

System performance and calibration can be confirmed at any time by running an on-board "standard ingot" stored within the tool.

The tool accepts ingots delivered by client's robotic material handling system, or by manual loading and unloading.

SYSTEM DETAILS

• Inspections Performed: Weight, Length, Diameter, End Perpendicularity, Conductivity, Bar-Code Confirmation; additional client proprietary inspections.
• Control System and User Interface: PC-based controls system running on Microsoft Windows XP operating platform. Custom-designed, touch-sensitive user interface.
• Material Handling: Ingots supported by V-blocks moving on linear track system.
• Throughput: Approx. 69-second cycle time.
• Safety: All machinery and metrology equipment contained within fully interlocked and laser-shielded enclosure. No operator access while control power is active.