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EBARA Technologies, Inc. - ET-WS Series Turbomolecular Pumps

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EBARA's Wide-Range Type Turbomolecular Pump ET-W Series features the five-axis magnetic bearing and wide pressure range giving a clean vacuum environment.

The ET-W Series has a large allowable backpressure (max. 3 Torr) enables simplification of foreline exhaust system. Anticorrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals.

ET-W Series provides a range of turbo pumps with pumping speed of N2 from 300 –1600 L/s.

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