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The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM.

VOS series pumps are lighter, more compact and pumpdown faster than most point-of-use pumps on the market today.

• Highest pumping speed to footprint ratio in the industry
• Unique pumping mechanism for fast pumpdowns
• Low Cost of Ownership
• No Nitrogen purge required in clean applications
• Robust, proven lobe style design
• High performance brushless DC motor
• Digital and analog signals available for interface to process tools
• Stackable installation available
• SEMI S2 assessed, NRTL Listed, CE Marked