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SOLAR CELLS AND MODULES MANUFACTURER SOLSONICA PURCHASES TWO EDWARDS ATLAS™ THERMAL CONDITIONING SYSTEMS

Low Cost-of-Ownership Exhaust Management Systems Used for Gas Abatement for SiN Deposition Tool

Edwards, a leading global supplier of vacuum and exhaust management equipment and services, today announced the sale of two ATLAS™ thermal conditioning systems (TCS) to Solsonica (Rieti, Italy), a newly established manufacturer of Photovoltaic (PV) cells and modules, also active in the design and construction of solar systems. Solsonica is a member of EEMS Group, the leading European operator and one of the worldwide leading service providers of all back end manufacturing services for semiconductor memories.

Edwards ATLAS TCS provides reliable, high-performance, low-cost exhaust management of the flammable and acidic gases that are by-products of the chemical vapor deposition processes used to manufacture semiconductors and next-generation solar cells. Solsonica will use the ATLAS TCS to abate the gases produced during silicon nitride (SiN) deposition in its polysilicon solar cell manufacturing operations.

"To successfully meet the growing global demand for alternative energy sources, future generations of solar energy products will have to be manufactured using the same high-volume processes used today in the semiconductor industry," said Enzo D'Antonio, Chairman of Solsonica. "Edwards established expertise in gas abatement applications in the semiconductor market made it a logical choice for our gas abatement technology needs. In addition, it already has a fully trained service support team in the region to help us ramp to production in the most quick and effective way."

Edwards ATLAS TCS technology incorporates a unique inward-fired radiant combustor and high-efficiency three-stage water scrubber and is ideally suited to the treatment of exhaust streams from CVD tools. The ATLAS TCS helps lower cost of ownership through reduced water usage, and features full tool interfacing for utilities conservation and maximized tool uptime. In addition, a small foot print helps optimize the use of fab space.

Edwards ATLAS TCS abates all hydrides and gives sub-TLV removal of acid gases, while minimizing NOx, products of incomplete combustion and hazardous air pollutants (HAPs). The technology is suitable for all CVD processes where effective powder handling and HAP abatement is needed.

"This sale to Solsonica highlights the benefits Edwards offers to customers in the solar industry," said Sia Abbaszadeh, Business Head, Solar & Flat Panel Display, Edwards "We are unique in our ability to provide them with an extensive range of innovative vacuum and abatement technologies that help reduce manufacturing costs, while also helping to meet even the most stringent factory emission requirements."