DualBeam™ Systems, Nova™ Family

The FEI Nova™ family provides high-quality nanoscale research tools for a variety of applications that involve sample characterization, analysis, prototyping, and S/TEM sample preparation. With a range of models that include SEMs with ESEM technology and two DualBeam™ systems, these tools are extremely versatile and appropriate for use in many nanotechnology work environments.

Featured Tools in the Nova Family

The new FEI Nova NanoSEM 30 Series brings superior low voltage resolution and high surface sensitivity imaging to the Nova Family of Ultra high Resolution Field Emission Scanning Electron Microscopes (UhR FE-SEM). A Schottky emitter allows for high stability emission and high current modes while the immersion lens optimizes secondary electron collection. Additionally, the new Nova NanoSEM features a helix detector that delivers high resolution images in low vacuum as well as at low kV. The 230 [PDF 234KB] and 430 [PDF 234 KB] systems feature 50 x 50 mm and 100 x 100 mm 5-axis motorized stages, respectively. The 630 [PDF 234 KB] system is equipped with a 5-axis high precision and stability 150 x 150 mm piezo stage.

Advantages and Capabilities

The Nova 200 NanoLab [PDF 187KB] and Nova 600 NanoLab [PDF 168KB] are versatile, high-performance DualBeam™ systems designed to support the 3D imaging requirements of today's nanotechnology materials science and life sciences labs. These DualBeam™ tools provide high-quality S/TEM samples at less than $US50 per sample—reducing the total cost of ownership.

Optimized for FIB cross-section analysis and high-resolution SEM imaging, the Nova 200 NanoLab DualBeam™ is a versatile tool capable of doing everything from cross sections and SEM imaging, to S/TEM sample preparation and electrical probing for failure analysis. The Nova 600 NanoLab (FIB/SEM) is a complete nanotechnology lab in a single tool, enabling top-down machining or deposition and ultra-high resolution 3D-characterization of nano-structures.

The Nova NanoSEM tools are ultra-high resolution FEG-SEMs with the world's only high-resolution, low-vacuum imaging capabilities for spectacular nanoscale characterization on charging and/or contaminating nanotech materials. The Nova NanoSEMs are available in three different stage sizes: 6" (150mm), 4" (100mm) or 2" (50mm).