|
||
|
Hiden Analytical - Diagnostic Tools for Electrical Plasma
Print
|
|
Plasma Characterisation:
A wide range of industrial processes use electrical plasmas and new applications are developing rapidly. In the microelecronics industry the demands of higher yields and shrinking device geometries mean that process reproductability and understanding is vital.
Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry.
Part Saved
Save part
