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Residual Gas Analysers

The Hiden RC and LC series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements.

Applications include:

• vacuum chamber leak detection
• vacuum quality measurement and monitoring
• virtual leak detection
• outgassing studies
• bakeout cycle/vacuum pump down monitoring

Residual Gas Analysers for Vacuum Diagnostics and Leak Detection

• RGA/ Leak Detection
• Virtual Leaks / Desorption
• Outgassing studies
• Bakeout cycles
• Pump Performance
• Chamber / Process gas Contaminants

Hiden RGA series quadrupole mass spectrometers for the examination of components present in a vessel or evolved from a process, featuring:

• Stability (less than ±0.5% height variation over 24 h).
• PPM Sensitivity, mass range to 300 amu, Remote (PC) or Local Control interface.
• MASsoft control via RS232, USB or multiple systems via Ethernet LAN.
• Fast access for Histogram, Trend Analysis and Analog peak displays.
• Mixed mode scanning e.g. Trend, Histogram and Analog peaks in multiple-windows.
• Simultaneous real time display of graphical and tabular trend analysis data.
• Cursor for peak height identification under mouse control.
• Real time background subtract, Automatic mass scale alignment.
• Data export facility to ASCII format and to all Windows devices.
• netMASsoft, an on board web server for RGA operation from your Web browser.

Other Products in the series include:

Vacuum Process Gas Analyser - HPR-30

• CVD / PECVD / RIE / LPCVD / MOCVD
• Vacuum Coating / Plasma Etching
• Sputter Deposition
• Contamination Studies
• Base Pressure Fingerprint
• Leak Detection / Virtual Leaks / desorption
• Outgassing / Bakeout / Pump Performance
• Chamber / Process gas contaminants

The HPR-30 process gas analysis system is a compact gas analysis system for monitoring residual gases and vacuum processes, featuring:

• Compact bench-top / mobile cart / console rack construction.
• Direct re-entrant orifice with differential pumping for optimum sensitivity / response.
• Process pressure range from 1 mbar to 10^-4 mbar.
• High Sensitivity (to 5 ppb), mass range options to 1000 amu.
• Soft Ionisation for the analysis of complex organics / appearance MS studies.
• Stability (less than ±0.5% height variation over 24 h).
• MASsoft control via RS232, RS485 or Ethernet LAN.
• Pneumatic valve control for automatic operation with manual override and fail-safe isolator in case of power failure or overpressure.
• Automated simultaneous data acquisition / analysis with local display alarm panels.

HPR-80 Quantitative Gas Analyser for Reactive / Corrosive Species

• Plasma / Reactive ion Etch Studies
• CVD / PVD / MOCVD
• Semiconductor wafer-fab studies
• Vacuum / Plasma Processing
• Quantitative analysis of reactive species
• HF, HCl, HBr, and CFC processes studies

Hiden HPR-80, a specifically designed system for high performance corrosive gas analysis and monitoring for semiconductor and vacuum processes, featuring:

• Heated Electro-polished heated flexible bellows, quick coupling port connector.
• Purged, inert viscous flow QIC calibration inlet for quantitative analyses.
• High Sensitivity (to 5 ppb), Mass to 2500 amu.
• 1 mTorr to Atmosphere sampling pressure operation.
• Capacitance manometer for species independent pressure monitoring.
• Stability (less than ±0.5% height variation over 24h).
• MASsoft control via RS232, RS485 or Ethernet LAN.
• Matrix Inversion, Normalisation and Single Peak Referencing

High Pressure Residual Gas Analyser - HMT100-RC

• Process Monitoring
• RGA/ Leak Detection
• Virtual Leaks / Desorption
• Outgassing studies
• Bakeout cycles
• Pump Performance
• Chamber / Process gas Contaminants

Hiden HMT RGA quadrupole mass spectrometers a unique dual mode RGA system examination of components present in a vessel or evolved from a process, featuring:

• HMT mode for high pressure operation to 4x10^-3 Torr (min pressure 4x10^-8 Torr).
• RGA mode for high sensitivity operation at P < 10^-4 Torr (min pres1x10^-11 Torr).
• 100 amu mass range, Remote (PC) Control interface via MASsoft HMT.
• Stability (less than ±1% height variation over 24 h).
• MASsoft HMT control via RS232, RS485 or multiple systems via Ethernet LAN.
• Fast access, mixed mode scanning e.g. Trend and Analog in multiple-windows.
• Simultaneous real time display of graphical and tabular trend analysis data.
• Cursor for peak height identification under mouse control.
• Real time background subtract, Automatic mass scale alignment.
• Data export facility to ASCII format and to all Windows devices.
• Dynamic Data Exchange facility for real time data transfer to other DDE client compatible Windows™ applications eg Excel, SPC-IV statistical process control software.