Residual Gas Analyzers (RGAs)
Product Announcement from INFICON, Inc.
INFICON residual gas analyzers (RGAs) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases.
PPM422 Plasma Process Monitor
The Transpector® Family of Residual Gas Analyzers (RGAs)
Transpector® Gas Analyzers provide accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection.
Transpector 2 Gas Analysis System: Superior Sensitivity for Contamination Control; this RGA provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing.
Transpector HPR Gas Analysis System: An RGA with consistent Sensitivity for Optimal Contamination Control
Transpector XPR3 Gas Analysis System: PVD Process Monitoring Without Complex Pressure Conversion; this RGA monitors physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility.
Transpector CPM Compact Process Monitor: Comprehensive Gas Analysis Made Affordable; this RGA is a full-featured, compact and economical gas analyzer that's ideally suited for in situ monitoring of complex processes.
Transpector Software: Process Characterization Software For The Transpector Gas Analysis System
IPC400 Pumping Packages: Design an Easy-To-Use Pumping Package that Extends Your Sampling Range.
Mobile Cart for Transpector CIS2 and IPC400 Systems: Self-Contained Cart for Mobile Troubleshooting