In Microsystems, one size does not fit all. That's why ITC develops complete solutions on a project-by-project basis. To ensure they meet your exact requirements, Infotonics Technology Center Inc. offers a wide variety of process flows. For example, Xerox's Hybrid Silicon Micromachining Process combines Single Crystal Silicon on Insulator (SOI) micromachining with Surface and Bulk micromachining and supports the fabrication of MEMS, MOEMS, and micro-optic devices.
Infotonics Technology Center Inc.'s extensive MEMS fabrication capabilities also include: Photolith, Etch, CVD, PVD, CMP/Grind.
Device Technologies:
Optical
Single Crystal Si Micromirrors
Si Waveguides
Dielectric Gratings and Filters
Gratings
RF
Resonators
Tunable Capacitors
Microfluidic
Microchannel & Mixers, Microvalves & Pumps
Filters
Micronozzles
Mechanical
Comb Drives
Cantilevers & Membranes
Flip-up Structures
Foundation Process Uses:
- Optical MEMS platform for low cost on-chip integration of planar light circuits and optical switching
- Hybrid integration of light emitters and detectors with SOI-based Micro-Opto-Electro-Mechanical Systems
For a complete list of MEMS Fabrication capabilities or to set up a consultation, contact Infotonics Technology Center Inc. at 585.919.3000 or email them.
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