HOLLOW SHAFT 150 mm
LOAD CAPACITY 500 kg
REPEATABLE to 20 arc-sec (read more)

XY-rotary systems for high precision clean room applications

The demand for a high accuracy stages is met with IntelLIDrives integrated XY-ROTARY system that addresses the needs of scanning microscopy, wafer and printed circuit board inspection, semiconductor manufacturing and many others where precision is important.

Very precise fine positioning and control is easi... (read more)

High Precision, Large Open Center XY Stages with Linear Motors (read more)

Direct drive rotary servo tables feature IP rated ingress protection. (read more)

Four axes cylindrical robot features two linear axis and two rotary axes around respective linear axis. (read more)

Large open frame XY-Rotary system, stroke up to 300 x 300 mm (read more)