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GOAL

* Safely handling and keeping the semiconductor wafers precisely aligned in chambers where materials are deposited by physical vapor deposition (PVD).

* Avoiding wafer breakage, due to mis-alignment, at the very small entrance to the chamber.

* Ensuring uniform deposition of the material layer on the wafer.

SOLUTION

The Kaman SMU-9000-5U measuring system How does the system work? In PVD systems, wafers are moved into several chambers, each depositing a different material. The sensors are mounted inside the deposition chambers. Each sensor measures the position of the end effector that enters the chamber carrying the wafer. Kaman's systems provide an analog output - or an optional digital interface - to signal out-of-tolerance position.

Result: Improved uptime and higher yields.

THE KAMAN ADVANTAGE

Why use the Kaman SMU-9000-5U measuring system? It is noncontact. Using proven eddy current technology, each sensor can measure the position of the end effector without ever touching it. It offers high resolution. The system can sense position change to one nanometer. You can be sure of results with repeatability. The sensor allows highly reproducible alignment of the wafer in the chamber. The system is versatile. The SMU-9000-5U measuring system is available with a wide range of sensor options.