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MEI, LLC - MEI Solar Evolution Wafer Cleaning Equipment

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Dry to Dry High Throughput, Process Multiple Lots and Recipes Simultaneously

For Solar wafer processing, the MEI Solar Evolution provides higher throughput, because it is able to process multiple lots and multiple recipes simultaneously, using the sophisticated process controls of MEI's proprietary IDX Automation Software.

MEI Solar Evolution features

  • High throughput with multiple robots
  • 200 wafer carrier cassettes
  • 1200 wafers per hour
  • Extra wide tanks for multiple carriers
  • Input and output scales for wafer thinning metrics
  • Six inputs and outputs with automated staging

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