Designed for the most challenging semiconductor and high purity thin-film applications, the MKS ALTA™ Series of digital mass flow controllers include several technological enhancements to improve cost of ownership and to increase tool throughput. To reduce MFC inventory and costs, the ALTA™ multi-range, multi-gas capability allows customers to stock single ALTA™ MFC types for a variety of applications. Process cycling times are reduced through fast gas settling times.
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