Designed for the most challenging semiconductor and high purity thin-film applications, the MKS ALTA™ Series of digital mass flow controllers include several technological enhancements to improve cost of ownership and to increase tool throughput. To reduce MFC inventory and costs, the ALTA™ multi-range, multi-gas capability allows customers to stock single ALTA™ MFC types for a variety of applications. Process cycling times are reduced through fast gas settling times.
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DC Power Generators, Electrostatic Matrix Charging System, RMU Linux Logic Controller, Series 46 Filter Housing Heaters, HPS® Series 25 BioPharm Process Piping, MultiGas™ 2030 High Speed Transient Gas Analyzer, piMFC Pressure Insensitive Mass Flow Controller, SurePower™ RF Generators, Type 627C/628C e-Baratron® Capacitance Manometers, Baratron® Compact, Low Current, Heated Manometer, Baratron® All-Digital Pressure Transducers, Series 999 Quattro™ 4-in-1 Vacuum Transducer , PDR900 Vacuum Gauge Power Supply/Readout Unit, Cirrus™ Atmospheric Gas Pressure Monitor, MicroNode™ Compact Fieldbus and Ethernet I/O , O3MEGA Integrated Ozone Delivery System, CONTINUUM™ Universal Industrial Network Gateway , DELTA™ II Flow Ratio Controller, e-Vision™ Residual Gas Analyzer (RGA), PICO Sniffing Helium Leak Detector
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