The Type 890 Series Baratron® compact digital pressure transducers utilize an advanced digital microprocessor to produce exceptional stability, the lowest output drift on the market, and high accuracy up to 20 times better than conventional pressure transducers – all at a price lower than competitive products and with the full backing of the extensive MKS global customer support network.
Today's gas delivery applications—whether in semiconductor, flat panel or thin-film manufacturing—require pressure transducers that are smaller in size and have higher stability over long periods of time to improve the repeatability of the process. Based on the field-proven MKS Baratron capacitance technology, this is the latest generation of MKS gas delivery pressure transducers developed to meet the needs of OEMs and gas suppliers who require a compact digital transducer at a lower cost. The 890 Series can be used in the smallest gas panels and cabinets on the market today, particularly in systems that use 1.125-inch surface mount design. In addition, this Baratron product is the first pressure transducer for the semiconductor manufacturing industry that uses 100% digital architecture. Applications for the 890 Series pressure transducers include process tool gas panels for semiconductor, flat panel display and data storage manufacturing, as well as gas cabinets and valve manifold panels for gas suppliers and integrators.
The 890 Series transducers have wetted surface finishes of better than 5 µin. Ra, and employ all-metal sensors for high overpressure tolerances. These compact transducers are only 1 inch (25 mm) in diameter and less than 5 inches (125 mm) high with the integrated, rotatable LED display. They can be easily zeroed via a convenient push button. Using a modular "building block" design, these transducers can be custom-configured to your exact requirements, with single-ended and flow-through configurations, five standard pressure ranges (1000 Torr to 3000 psi), more than 10 different mechanical and mounting configurations, and a wide range of electrical configuration and connectors.
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