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Cirrus™ Atmospheric Pressure Gas Monitoring system is ideal for the on-line monitoring and analysis of gases and gas mixtures including solvent vapors, hydrocarbons, inorganic gas species (including corrosives), freons and noble gases. Its compact design and flexible control front-end make the Cirrus system suitable for a broad range of applications within the semiconductor, analytical, emissions testing and fuel cell industries.

At the heart of every Cirrus system is a precision-built quadrupole analyzer incorporating a closed ion source, a triple mass filter and a dual (Faraday and Secondary Electron Multiplier) detector system. This analyzer configuration optimizes sensitivity and long-term stability performance. Use of the quadrupole analyzer enables monitoring of multiple gases at the same time over a wide dynamic range (from ppb to percentage levels). The Cirrus gas monitoring system is fully automated and can be operated through a single Ethernet interface. MKS Process Eye ProfessionalTM software provides application-specific interpretation, control, and alarm functions, and allows correlation with data from other sensors. A silica capillary inlet provides rapid response, while an inert chamber and low-maintenance, automated bake-out and heating capability ensure low background contamination and prevent condensation during measurement.