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The DELTA™ II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution.

The DELTA™ II mass flow ratio controller divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user to maximize process uniformity and repeatability. The DELTA™ II flow ratio controller with its improved performance and more compact design is the second generation of MKS industry leading Delta controllers enabling process gas flow ratio control.

Improves Process Performance

• Wider dynamic ratio control range and faster gas flow response resulting in shorter process cycle time and increased throughput
• Accurately controls flow ratio providing for better process optimization and repeatability
• Digital control loop provides rapid response to setpoint independent of the gas mix
• Embedded e-diagnostics increases tool uptime through reduction of "No Problem Found" product replacements

• Ability to check functionality without removing the controller
• Allows monitoring of performance parameters during operation

Easy to Integrate and Operate

• Straightforward configuration and diagnostics through Ethernet interface

• Uses standard web browser – no special software required
• Includes remote PC application
• Bright LED display provides easy viewing of flow ratio, temperature and Ethernet address

Reduces Costs and Complexity

• Fewer components than dual MFC arrangements reducing critical I/O costs
• Smaller footprint