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A low-cost, compact measurement solution

Andover, MA, May 5, 2009 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the Series 970 Cold Cathode Transducers, a compact and reliable measurement solution for pressures ranging from atmospheric to 10^-8 Torr. The low-cost Series 970 transducers may be mounted in any orientation, and include both analog and digital communication for ease of operation.

The 970 Series transducers use up to four sensors, including cold cathode, MicroPirani™ and Piezo technologies. This provides for superior functionality over a wide measurement range, and eliminates the need for multiple gauges. The cold cathode design is user serviceable, decreasing downtime and outside costs. The MEMS-based Micro Pirani sensor allows low turn-on pressure for enhanced reliability. It is automatically zeroed during the pump down cycle for improved accuracy.

The transducers can be used with the PDR900 controller for easy set up and use. Three independent relay set points provide process control; users can configure set point values, hysteresis and direction via digital communication. All adjustments and monitoring are delivered in real-time via a host computer.