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The e-Vision 2 RGA is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money. The e-Vision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have served to make MKS the world leader in RGA products over the widest range of applications — from semiconductor tools or particle accelerators to general industrial applications.

Applications:

• Leak detection of vacuum lines, welds and seals
• Vacuum diagnostics
• Pump down monitoring
• Chamber bake out monitoring
• Leak checking of coolant lines within a vacuum chamber
• Chamber contaminant monitoring
• Monitor cryo-pump performance
• Monitor getter performance