High-speed and high-resolution Scale
Product Announcement from Magnescale Americas, Inc.
High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines.
- High-resolution scale with signal wavelength of approx138nm, outperforming light wave interferometer systems
- High stability, unaffected by humidity, air pressure and air disturbances
- Reference point accuracy : ±0.1μm
- Scale accuracy : ±0.04μm or better (measuring length : 40 mm)
- Completely non-contact design Return error is virtually eliminated.
- Special non-magnetic and vacuum-compatible models available
- Using low expansion glass : -0.7 x 10-6/ ? (measuring length : 10 to 420 mm)
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