High Accuracy Position Sensor
Product Announcement from MicroSense, LLC
The MicroSense 8810 capacitive sensor is designed for precision linear position sensing applications including:
Precision positioning stage control
Non-contact semiconductor and solar wafer detection for height sensoing
Adaptive optics actuator feedback sensor
The 8810 capacitive sensor is designed for fast response, with bandwidth up to 20 kHz. The sensor output is analog, +/- 10 volts, for simple interface. A variety of probes, or sensor heads are available.