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Planar XY Air Bearings

For the highest precision applications, Nelson Air has developed a number of Planar XY air bearing stages. These systems use air bearings, which ride directly on a granite or aluminum base. By eliminating the height stackup and overhung loads typical of stacked stage designs, planar air bearings achieve flatness of travel equal to or better than the actual flatness of the base. In addition, these systems have superior stiffness and load capacity. Finally, because the repeatability of air bearings is much better then mechanical bearings long travel systems can be calibrated for extremely high accuracies.

Typical Planar XY Stage Features:

· Load capacity from 1 lb to 1,000 lbs

· Flatness/straightness better than 0.0001" over travel

· Stiffness from 50,000 to 1,000,000 lbs/in

· Travel from 4"x4" to 60"x60" and longer Many sizes, configurations and materials are available.