Vacuum System Traps...Single & Multi-Stage
Product Announcement from Nor-Cal Products, Inc.
Nor-Cal Products, Inc. Increase your system's throughput and extend preventative maintenance intervals by 2X or more with LPCVD/TEOS multistage foreline traps. The first stage is a stainless steel gauze filter which collects crystalline TEOS before it reaches downstream piping and isolation valves.
The second stage is a 10 micron fiberglass filter which removes silicon dioxide which causes frequent PMs in throttling butterfly valves. The third and final stage is a reservoir which collects liquid TEOS without restricting foreline conductance.
The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. Standard finish is beadblasted. Electropolish is also available on request.