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Vacuum System Traps...Single & Multi-Stage

Product Announcement from Nor-Cal Products, Inc.


 Vacuum System Traps...Single & Multi-Stage-Image

Nor-Cal Products, Inc. Increase your system's throughput and extend preventative maintenance intervals by 2X or more with LPCVD/TEOS multistage foreline traps. The first stage is a stainless steel gauze filter which collects crystalline TEOS before it reaches downstream piping and isolation valves.

The second stage is a 10 micron fiberglass filter which removes silicon dioxide which causes frequent PMs in throttling butterfly valves. The third and final stage is a reservoir which collects liquid TEOS without restricting foreline conductance.

The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. Standard finish is beadblasted. Electropolish is also available on request.