Intellisys throttling pendulum valves provide equipment manufacturers with unmatched pressure control performance and low particle generation. Other pendulum valves use one actuation method to move the gate and another method to seal, creating an "out of control" area near the closed position. To compensate for this, system designers often add secondary bypass lines with costly throttling butterfly valves for high pressure, high flow regimes, such as NF₃ cleans. Intellisys pendulum valves utilize exclusive closed-loop motor control and a patented Penduroll^® actuator mechanism to move the sealing gate rapidly across the valve bore and transition to the axial direction. The result is precise pressure control over the entire valve stroke, most notably near the closed position. The Intellisys control system is the only choice for demanding 300mm Etch and CVD applications which require fast, accurate pressure control across the entire range of critical process flows and chamber pressures.

Nor-Cal Products' closed-loop motor control, monitors and controls the exact position of the valve's gate mechanism. The adaptive pressure controller provides over eight million steps of addressable resolution to position the gate exactly where it needs to be to control pressure or to seal. In addition, the Nor-Cal control system's speed of actuation is unequaled in providing optimal transient response, pressure set-point stability, and overall process improvement. The APC's adaptive algorithm outperforms "learn modes" by optimizing phase and gain settings in real time during varying chamber pressure and flow conditions.

General Features and Benefits

• Space saving, low cost design
• Low particle generation
• High reliability
• Easy maintenance, split body allows O-ring replacement without removing valve from system
• Body can be heated to 150ºC with optional heater jackets
• Available in ISO and JIS flange styles