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OERLIKON LEYBOLD VACUUM DEVELOPS HIGH-VACUUM CRYOGENIC PUMP

THAT FEAUTRES HIGH SUCTION VOLUME

Export, PA, May 2008 – Oerlikon Leybold Vacuum has developed a High Vacuum Cryogenic Pump that has a suction volume of 60,000 liters/second for nitrogen and 180,000 liters/second for water vapor. The pump produces hydrocarbon-free ultra high vacuum reaching ultimate pressures below 10^-7 mbar and has a flange diameter of 1.4 meters. Cryogenic pumps are used in vacuum-based coating technology applications, vacuum furnaces and R&D laboratories, and for evacuating space simulation chambers in which satellites and other equipment are tested. Using adsorption technology, these pumps freeze gases at extremely cold temperatures below 10 Kelvin (-253°C) to simulate conditions beyond Earth's atmosphere.

"Our High Vacuum Cryogenic Pump sets the standard for vacuum pumps used in laboratory and space simulation applications," says Brett Rock, Regional Marketing Manager for R&D, at Oerlikon Leybold Vacuum USA, Inc. "We take pride in that accomplishment and look forward to using it for building upon our success in a variety

of markets."
Oerlikon Leybold Vacuum USA engineers, produces and markets vacuum pumps for applications in analytical & research, industrial processing and semiconductor manufacturing. Oerlikon Leybold Vacuum USA is a division of Oerlikon Leybold Vacuum GmbH headquartered in Cologne, Germany, and has more than 60 locations worldwide, with major centers in North America, Europe and Asia.

For more information, contact Mario Vitale, Oerlikon Leybold Vacuum USA Inc., at 724.325.6565 or 800.764.5369, or mario.vitale@oerlikon.com

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