M-824 Vacuum Compatible High Precision Six-Axis Alignment Hexapod (6-DOF)
- Six Degrees of Freedom
- Vacuum Compatible Versions
- Load Capacity 10 kg
- Travel Ranges to 45 mm (linear), 25° (rotation)
- 7 nm Resolution
- 300 nm Min. Incremental Motion
- Repeatability ±0.5 µm
- Very Compact Design
- Self Locking to 10 kg
The new M-824 is based on PI's experience of more than a decade with parallel kinematics Hexapods like the M-850 / M-840 and F-206 (see catalog). The M-824 is the ideal micropositioning system for all complex positioning tasks which depend upon high accuracy and resolution in six independent axes. In addition to positioning all axes it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.The vacuum version, the M-824.3VG, enables use in applications such as X-ray diffraction microscopy with ambient pressures down to 10-6 hPa.
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Supplier:
PI (Physik Instrumente) L.P.
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