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PI (Physik Instrumente) L.P. - Linear Piezo Motor: Sub-nm Precision, High Load

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More on Piezo Stepping Motors (PiezoWalk® Piezomotors:

http://www.physikinstrumente.com/en/news/fullnews.php?

Overview:

http://www.physikinstrumente.com/en/products/piezo_motor/nexline.php

Nexact Miniature Linear Stepping Piezo Motor / Actuator: Small, Low Cost, Ideal for OEMS

http://www.physikinstrumente.com/en/news/fullnews.php?newsid=123&NRGlbl

NEXLINE® High-Load Piezoelectric Precision Nanopositioning Drive

  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, 600 N Holding Force, Self-Locking
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking

The novel, patented PiezoWalk® drive design combines long travel ranges (hundreds of millimeters) with high stiffness and high resolution (better than 0.1 nm).

Coordinated motion of shear and longitudinal piezo elements is what allows NEXLINE® to break away from the limitations of conventional Nanopositioning actuators.

NEXLINE® motion is possible in two different modes: a high-resolution, high dynamics analog mode, and a step mode with theoretically unlimited travel range.

See Nexline Presentation at SEMI Website:

High Force, High Resolution, Long Travel Linear Actuators / Positioning Systems Featuring Picometer Resolution and Millimeters of Travel

Piezo Motor Catalogs:

Download the Catalog: Stepping (Walk) Piezo Motors (Higher Precision, Higher Force, slower):

Download the Catalog: Ultrasonic Piezo Motors (Faster, less accurate, lower force):


PiezoMotor Overview:

Piezo Motor White Papers

Piezo Motor Selection Guide

Piezo Motor Technotes

Ultrasonic Piezo Motor Video

More PI News

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