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More on Piezo Stepping Motors (PiezoWalk® Piezomotors:
http://www.physikinstrumente.com/en/news/fullnews.php?
Overview:
http://www.physikinstrumente.com/en/products/piezo_motor/nexline.php
Nexact Miniature Linear Stepping Piezo Motor / Actuator: Small, Low Cost, Ideal for OEMS
http://www.physikinstrumente.com/en/news/fullnews.php?newsid=123&NRGlbl
NEXLINE® High-Load Piezoelectric Precision Nanopositioning Drive
The novel, patented PiezoWalk® drive design combines long travel ranges (hundreds of millimeters) with high stiffness and high resolution (better than 0.1 nm).
Coordinated motion of shear and longitudinal piezo elements is what allows NEXLINE® to break away from the limitations of conventional Nanopositioning actuators.
NEXLINE® motion is possible in two different modes: a high-resolution, high dynamics analog mode, and a step mode with theoretically unlimited travel range.
See Nexline Presentation at SEMI Website:
Piezo Motor Catalogs:
Download the Catalog: Stepping (Walk) Piezo Motors (Higher Precision, Higher Force, slower):
Download the Catalog: Ultrasonic Piezo Motors (Faster, less accurate, lower force):