Miniature Vacuum Hexapod 6-Axis Positioner

Product Announcement from PI (Physik Instrumente) L.P.

Miniature Vacuum Hexapod 6-Axis Positioner-Image

Information on other High Vacuum Precision Positioners (Linear Stages and Rotary Stages)

Versatile, for Small Vacuum Chambers

Because of its small size, the M-811.STV is easily integrated into vacuum chambers. Its versatility and ease of use - the user can randomly set the center of rotation by a simple software command - highly facilitate operations in vacuum.

Features & Advantages

  • Small but High Load Capacity: 11 lb (5 kg)
  • High Precision: Actuator Resolution 0.04µm, Repeatability : ±0.5µm
  • Versatile Motion: 6 Degrees of Freedom + Randomized Center of Rotation
  • Velocity to 10 mm/sec
  • XYZ-Travel: 35/35/13mm; Rotations: XYZ: 20°/20°/40°
  • Digital Controller and Software Included

More Information on Hexapod Robotic Positioners:

Software, Programming and Controller

Like all PI parallel kinematic Hexapod positioners, the miniature vacuum Hexapod comes bundled with software and a highly specialized digital controller with high-speed Ethernet connectivity. Programming and commanding the Hexapod is simple and straight-forward, as all positions are conveniently given in Cartesian coordinates (XYZ, Theta X, Theta Y, Theta Z).

Parallel Kinematics vs Conventional Serial Kinematics Parallel-kinematics positioning systems have several advantages over conventional stacked multi-axis positioners. All six actuators directly affect one common platform, significantly reducing mass and inertia. Moreover, there is no accumulation of the lateral and angular runout errors of the individual axes. Unlike rotation stages and goniometers which come with a fixed center of rotation, the PI Hexapod concept lets the user set and change the pivot any time via software.

Hexapod Applications, Range Today, hexapod applications are found in all technology fields: high-energy physics, medical engineering, X-ray microscopy, photonics alignment, semiconductor test & metrology, astronomy, precision machining, aeronautics, etc. PI is the leading manufacturer of precision micropositioning and nanopositioning hexapods. The company introduced its first hexapod 2 decades ago for a precision alignment system in an astronomical telescope and provides a large variety of different models with load capacity from 2 kg to more than 2,000 kg.

About PI PI is a leading manufacturer of precision motion control equipment, piezo systems, piezo motors and actuators for photonics, bio-nanotechnology, medical engineering & semiconductor applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 700+ PI USA designs and manufactures piezo products at the company's US headquarters in Auburn, MA.

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