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1-12 Channels, Many Variations

• 1 ch OEM boards (E-621)
• 1 ch low power / high power bench top (E-625 / E-665)
• 1 to 12 channel rack mount (E-501)

The controllers provide precision control of piezo nanopositioning systems and actuators

• Integrated 24-Bit USB Interface
• RS-232 InterfaceNetwork Capability with up to 12 Channels
• Up to 12 W Peak Power
• Position Control with Strain Gauge or Capacitive Sensor
• Notch Filter for Higher Bandwidth
• Additional Analog Interface
• Table for User-Defined Curves

The piezo controllers comprise additional circuitry for position sensing and servo-control. Displacement of the piezo is controlled by an analog signal. Positioning accuracy and repeatability down to the sub-nanometer range is possible, depending on the piezo mechanics and sensor type. The high resolution makes these controllers ideal for long travel piezo stage systems.

Software Support / GCS Command Set

The E-621 controller comes with Windows installation software, DLLs and LabVIEW drivers. The extensive command set is based on the hardware-independent General Command Set (GCS), which is common to all current PI controllers for both nano- and micropositioning systems. GCS reduces the programming effort in the face of complex multi-axis positioning tasks or when upgrading a system with a different PI controller.

Choice of Position Sensors

High-resolution position sensors provide optimum positional stability and fast response in the nanometer range. Capacitive sensors measure position directly and without physical contact (direct metrology). Alternatively compact cost-effective strain gauge sensors (SGS) and piezoresistive strain gauge sensors are available.

Faster through better Servo Design

The integrated notch filters (adjustable for each axis) improve stability and allow high-bandwidth operation closer to the resonant frequency of the mechanics.

Multi-Axis Network for up to 12 Channels

Up to twelve E-621s for capacitive or SGS sensors can be networked and controlled over a single PC interface. The different modules are connected in parallel (not daisy-chained) over the link.

High-Resolution Digital Control

The digital interface includes high-precision 24-bit A/D converters for optimum position stability and resolution and supports fast communication with the host-computer.