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Typical Applications: Bio-Technology, Nanotechnology, AFM & SPM Scanning Microscopy, Nano-Manipulation, Bio-Technology, Nano-Imprint, Semiconductor & Data-Storage Test Equipment.

PicoCube™ XY and XYZ piezo stage systems are ultra-high-performance, closed-loop piezoelectric scanning systems. Designed for AFM (Atomic Force Microscopy), SPM (Scanning Probe Microscopy) and nanomanipulation applications, they combine an extremely low-inertia (10 kHz resonant frequency!), high-speed piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback capable of 50 picometers resolution.

Parallel Metrology: Based on a parallel-metrology system with capacitive feedback, the compact unit is a design breakthrough in closed-loop piezo scanner technology. Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for the slightest off-axis motion in real time. The benefits are reduction of runout and off-axis errors, straighter motion and improved repeatability.

Features & Advantages:

• 25 Picometers Resolution
• XY and XYZ Motion
• Up to 10 kHz Resonant Frequency
• Smallest Closed-Loop Multi-Axis Stage with Capacitive Sensors
• High-Speed for AFM / SPM (Resonant Frequency 10 kHz)
• Excellent Manipulation Tool for Nanotechnology
• Parallel Metrology for Highest Multi-Axis Linearity & Stability
• Small & Rugged Design with Titanium Case
• Vacuum Compatible

for more information go to: http://www.physikinstrumente.com/en/products/nanopositioning/nanopositioning_selection.php?&table=3

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