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Polytec's New UHF-120 Laser Doppler Vibrometer (LDV) characterizes out-of-plane vibrations at unprecedented frequencies as high as 600 MHz. The system retains the advantages and features familiar to LDV users and opens many new applications in the testing of RF MEMS, ultrasound transducers, SAW filters and laser ultrasonic NDE.

Until recently, Polytec's LDVs were limited to measuring vibration frequencies below 24 MHz. Continued technological advancements in ultrasonics and in micro and nanotechnology have resulted in the need to measure far higher frequency (UHF) mechanical vibrations.

Polytec's New UHF-120 Vibrometer characterizes the out-of-plane vibrations at ultra-high frequencies, extending the vibration frequency bandwidth up to 600 MHz. Complete with a new optical arrangement, the system retains the advantages and features familiar to laser vibrometer users such as ease-of-use, resolution and dynamic range. The system consists of a heterodyne interferometer with a controller box. The optical head provides a heterodyne detector signal that is acquired with a fast digital oscilloscope. The digitized detector signal is transferred to a PC where the heterodyne carrier is demodulated by a new software module in Polytec's Vibsoft package. Results are displayed in time or FFT mode.

The system has a gate function for reducing the output light power to minimize the energy transfer from the measurement beam to the structure and for easy alignment of the beam on the specimen. In addition, an integrated camera aids in the positioning of the measurement spot together with bright-field microscope illumination.

Specifications

• Max. vibration frequency: 600 MHz
• Amplitude resolution at 4.88 kHz RBW: <2 pm
• Number of FFT lines: >6 million

Typical Applications

• RF MEMS
• BAW/SAW filters
• NEMS
• Programmable MEMS clock oscillators
• Ultrasonic motors
• Ultrasonic imaging transducers
• Laser ultrasonics