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The new CHRocodile MI5 from Precitec Optronik offers simple and highly accurate distance and thickness measurements for semiconductor wafers and multi-layered thin film at up to 5 points. It provides non-contact silicon scanning with just one measuring point per channel and can measure a wafer precisely to a thickness of 1 mm in all production environments. With a single probe, it is now possible to measure both distance and thickness.

This new modular design combines the well established benefits of the CHRocodile IT sensor and probes with a lower cost solution for those looking to meaure at multiple points. There is a large working distance, which keeps your materials safely away from the probe and eliminates the danger of damage to either material. The MI5 is highly advantageous for those looking to meaure inline, or in a production environment.

With the semiconductor and electronic industries dependant on high quality standards, the high precision of the CHRocodile Sensors with submicron height resolution easily serve these typical applications:

• Silicon wafer thickness
• Measurement of structures on semiconductors
• Manufacturing of masks
• Quality assurance on bondings (length of leads etc.)
• Measurement of transparent coatings
• Determination of varnish thickness (e.g. photo lacquer or damping layer on ICs)

This new non-destructive measuring process incorporates a sensor that works with interferometry and uses infrared light instead of the usual white light. Measuring speeds are up to five times faster with a measuring range that is ten times greater (up to 3.5 mm air gap) compared with the white light method. The measuring unit can be integrated directly into the production process thanks to its robust and simple configuration. The economical and highly accurate CHRocodile IT is also ideal for use in the laboratory.

CHROCODILE IT SENSOR SPECIFICATIONS:

· 4000 Interferometric measurements per second

· SLD 1300 nm light source

· Resolution of 0.003% of measuring range

· Reproducibility of measuring range less than .02%

· Linearity error of less than ± 0.1%

· USB, RS232 and 2 analog outputs

· Trigger input, synchronizing output

· 3 encoder inputs

· 20 W rated power

· 85 – 264 V AC, 47 – 63 Hz, 120 – 370 V DC system voltage

· Operating temperature +5^°C to +50^°C

· Dimensions W: 260 mm H: 115 mm D: 310 mm

· Weight 11 lbs.

FOR MORE INFORMATION, please contact Heidi Olson.