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Rotary Systems, Inc. - Custom rotary union, stainless steel, 6 passage

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The rotary union pictured was designed to pass pneumatics and/or DI water for a Chemical Mechanical Planarization (CMP) piece of Semi-conductor equipment. The union is manufactured from 316 stainless steel and the shaft is hard chromed on the seal surface for hardness. We currently provide a number of multiple passage rotary unions to the Semi-conductor industry in the CMP field.

Please contact our Technical Sales Staff for your specific requirement.

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