Product Announcement from SUSS MicroTec


Our company is a full service Photomask provider capable of manufacturing High Precision Photomasks from 4" up to 32" on quartz or soda lime materials. We also offer Direct Write on Silicon Wafers up to 300mm.

Mask Protection Technology

MPT Coating (Mask Protection Technology) is a release [anti-sticktion] layer between the wafer and mask to minimize resist sticking and reduce mask cleaning.

MPT improves yield by reducing defects caused by resist and other contamination sticking to the mask. This in turn extends the life of the mask and reduces the number of mask cleanings