Product Announcement from SUSS MicroTec
Our company is a full service Photomask provider capable of manufacturing High Precision Photomasks from 4" up to 32" on quartz or soda lime materials. We also offer Direct Write on Silicon Wafers up to 300mm.
- Photomask Sizes: 4", 5", 6", 7", 9" and 14"
- Standard Photomask Thickness: .060", .090", .120", .190"
Call for details on other thicknesses
- Standard Material Substrate Types: Soda Lime and Quartz
Call for details on other types
- Standard Coating Types: AR Chrome and Iron Oxide
Call for details on other coatings
Mask Protection Technology
MPT Coating (Mask Protection Technology) is a release [anti-sticktion] layer between the wafer and mask to minimize resist sticking and reduce mask cleaning.
MPT improves yield by reducing defects caused by resist and other contamination sticking to the mask. This in turn extends the life of the mask and reduces the number of mask cleanings