Product Announcement from Saint-Gobain Ceramics - Hexoloy® Products
Semiconductor Hexoloy® SG SiC for DC Magnetron Sputtering
Hexoloy SG SiC is a unique electrically conductive analog of sintered silicon carbide that can be readily DC magnetron sputtered. Hexoloy SG SiC features high density and uniform electrical resistivity, less than 5 ohm-cm. It can be sputtered at high deposition rates compared to other ceramic target sources, with controllable thin film optical properties.
Hexoloy SG SiC offers a wide variety of desirable properties:
- Excellent hardness
- Corrosion resistance
- High temperature stability
- Excellent film adhesion