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Calibrated and compensated digital angular rate sensor with SPI interface in a robust miniaturized surface mountable SOIC-package. Included high-pass filter blocks the bias (zero-point) signal and makes the device non-sensitive for bias drift effects.

Key features

• High reliability and robustness over long lifetime
• Low vibration sensitivity
• High overload and shock
• Butterfly balanced design for high mechanical common mode rejection
• Closed-loop force feedback operation with electrostatic frequency tuning
• Ideal mono crystalline Si material
• Wafer level sealing with controlled Q-factor
• Low power
• Single voltage supply
• Fully digital with SPI communication and on chip OTP calibration
• Digitally controlled sample rate
• Bandwidth defined by built in 4th order digital LP filter
• Intrinsic continuous diagnostic monitoring
• No external components required

Application areas

• Industrial
• Agriculture
• Aerospace
• Subsea
• Rescue
• Maritime

Performance

Two models of this product are available depending on demands in target application. The lower range model has a lower scale factor (higher resolution) and better performance in regards to noise. A SPI interface enables easy and effective communication between customer application and sensor. A number of functions are available through the digital SPI interface including advanced self diagnostics.